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onlinelibrary.wiley.com/doi/10.1002/ppap.200600042/pdfAtmospheric Pressure Glow Discharge CVD of Al2O3 Thin Films
1. John L. Hodgkinson1,*,
2. David W. Sheel1,
3. Heather M. Yates1,
4. Martyn E. Pemble1,2
Article first published online: 13 OCT 2006
DOI: 10.1002/ppap.200600042 email:
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